Enhanced Visible Light Absorption by 3C-SiC Nanoparticles Embedded in Si Solar Cells by Plasma-Enhanced Chemical Vapor Deposition

Figure 4

FE-SEM images of the Si solar cell samples with (a) 7, (b) 10, (c) 20, and (d) 50 nm SiC nanoparticles embedded in 100 nm thick Si thin film using PECVD. The image (a) shows the formation of tetragonal-shaped Si microcrystals on the 7 nm SiC-embedded sample surface, and Si nanocrystals are observed on the 10, 20, and 50 nm SiC nanoparticle-embedded microtextured Si solar cell samples.