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Journal of Nanomaterials
Volume 2014 (2014), Article ID 130716, 7 pages
Research Article

Characterization of the Nanoporous Template Using Anodic Alumina Method

1Institute of Microelectronics, Department of Electrical Engineering, National Cheng-Kung University, Tainan 701, Taiwan
2Department of Electronic Engineering, I-Shou University, Kaohsiung 840, Taiwan

Received 14 April 2014; Accepted 3 June 2014; Published 30 June 2014

Academic Editor: Chien-Jung Huang

Copyright © 2014 Mau-Phon Houng et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Porous anodic aluminum oxide (AAO) is deposited on a 5 cm × 5 cm tin-doped indium oxide (ITO)/glass substrate, and the AAO/ITO/glass structure thus formed is used to reduce the amount of unreacted Al inside the AAO template, thereby reducing the transmittance of the AAO/glass structure. The enhancement of transmittance is achieved by modulating the diameter of the pores and varying the applied bias. The proposed AAO can be used at a high applied bias (up to 120 V) to improve the uniformity of the current density. Following pore-widening treatment and posttreatment annealing, the morphologies and transmittance of the AAO/ITO/glass structure were also investigated.