Research Article

Stop Flow Lithography Synthesis and Characterization of Structured Microparticles

Table 2

BET surface area of single via SiO2 and Al2O3 particles of different cross sections and multi-via cubic SiO2 particles.
(a) SiO2

Particle Cross Section ShapeSpecific Surface Area
(m2/g)
Pore Volume
(cm3/g)
Pore Size
(nm)

Square56 and 1140.09 and 0.151.9 and 2.1
Pentagonal690.081.2
Circular640.082.8

Range of particle dimension (µm)40–47

(b) Al2O3

Particle Cross Section ShapeSpecific Surface Area
(m2/g)
Pore Volume
(cm3/g)
Pore Size
(nm)

Square730.453.5
Circular810.732.9

Range of particle dimension (µm)75–90

4 via particle.