Table 1: Flow rate and resulting velocity and residence time for a precursor vapor with 1% of ferrocene concentration.

He flow rate,
(mL/min)
Precursor vapor velocity,
U (cm/s)
Residence time,
(ms)

30 ± 27.07 ± 0.5071 ± 1.5
60 ± 214.13 ± 0.5035 ± 1.5
120 ± 228.28 ± 0.5018 ± 1.5