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Journal of Nanomaterials
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Journal of Nanomaterials
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2014
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Article
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Fig 2
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Research Article
Microstructure Changes of Ti-Al-C Films Deposited by Filtered Cathodic Vacuum Arc
Figure 2
HR-TEM and SAED images of films deposited at different CH
4
flow (a) and (b): 30 sccm and (c) and (d): 50 sccm.
(a)
(b)
(c)
(d)