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Journal of Nanomaterials
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Journal of Nanomaterials
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2014
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Article
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Fig 5
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Research Article
Temperature Effects on a-IGZO Thin Film Transistors Using HfO
2
Gate Dielectric Material
Figure 5
AFM graph for a-IGZO TFTs with
gate dielectric with different annealing temperature.
(a)
(b)
(c)
(d)