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Journal of Nanomaterials
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Journal of Nanomaterials
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2014
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Article
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Fig 8
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Research Article
Design and Fabrication of Nanoscale IDTs Using Electron Beam Technology for High-Frequency SAW Devices
Figure 8
The atomic force microscopy images of AlN thin films deposited with RF powers of (a) 250 W and (b) 300 W.
(a)
(b)