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Journal of Nanomaterials
Volume 2014 (2014), Article ID 643672, 10 pages
http://dx.doi.org/10.1155/2014/643672
Research Article

Design and Fabrication of Nanoscale IDTs Using Electron Beam Technology for High-Frequency SAW Devices

1Department of Electrical Engineering, National Sun Yat-sen University, No. 70 Lienhai Road, Kaohsiung 80424, Taiwan
2Department of Electronic Engineering, De Lin Institute of Technology, Lane 380, No. 1 Qingyun Road, Tucheng District, New Taipei 23654, Taiwan
3Department of Computer and Communication, Shu-Te University, No. 59 Hengshan Road, Yanchao District, Kaohsiung 82445, Taiwan

Received 13 December 2013; Accepted 21 February 2014; Published 7 April 2014

Academic Editor: Liang-Wen Ji

Copyright © 2014 Wei-Che Shih et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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