Research Article
Design and Fabrication of Nanoscale IDTs Using Electron Beam Technology for High-Frequency SAW Devices
Table 3
The designed parameters of IDTs for the Rayleigh-mode SAW devices.
| | | E-beam direct write |
| | Input IDT electrode (pairs) | 30 | | Output IDT electrode (pairs) | 30 | | Area of device (m) | | | Wavelength (nm) | 937, 750, 562, 375 | | The overlapped length (m) | 60 | | Delay line (m) | 110 | | Distance between two electrodes (m) | 150 |
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