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Journal of Nanomaterials
Volume 2014, Article ID 672047, 7 pages
Research Article

Gold-Catalyzed Growth of Aluminium-Doped Zinc Oxide Nanorods by Sputtering Method

1NANO-Electronic Center, Faculty of Electrical Engineering, Universiti Teknologi MARA, 40450 Shah Alam, Selangor, Malaysia
2CoRe of Frontier Materials & Industry Applications, Universiti Teknologi MARA, 40450 Shah Alam, Selangor Darul Ehsan, Malaysia
3Kulliyyah of Engineering, International Islamic University Malaysia, P.O. Box 10, 50728 Kuala Lumpur, Malaysia

Received 23 April 2014; Revised 3 July 2014; Accepted 3 July 2014; Published 17 July 2014

Academic Editor: Margarida Amaral

Copyright © 2014 A. B. Rosli et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Aluminium-doped zinc oxide (AZO) nanorods thin films were grown by RF magnetron sputtering on gold (Au) metal catalyst. The Au catalyst layers with 5, 10, and 15 nm thickness were deposited on glass substrates by sputtering method followed by annealing for 15 min at 500°C to form Au nanostructures on the glass substrate. The AZO thin films were then deposited on the Au catalyst at different deposition temperature varying from 200 to 500°C. Postdeposition annealing processes of the Au catalyst resulted in different morphologies of the Au catalyst layers depending on their thicknesses. This in turn gave different AZO morphologies which suggest that the Au catalyst layer thickness and the deposition temperature contribute to the growth mechanism of the AZO nanostructures. AZO nanorods thin films having hexagonal wurtzite structure with individual nanorods on the film surface were obtained from the samples deposited on 5 and 10 nm thick Au catalyst with the deposition temperature of 300°C.