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Journal of Nanomaterials
Volume 2014, Article ID 690498, 6 pages
http://dx.doi.org/10.1155/2014/690498
Research Article

Thermal Effect on the Structural, Electrical, and Optical Properties of In-Line Sputtered Aluminum Doped Zinc Oxide Films Explored with Thermal Desorption Spectroscopy

Department of Electrical Engineering, Kun Shan University, Tainan 71003, Taiwan

Received 7 May 2014; Accepted 18 May 2014; Published 29 May 2014

Academic Editor: Teen-Hang Meen

Copyright © 2014 Shang-Chou Chang et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Shang-Chou Chang, Tien-Chai Lin, and To-Sing Li, “Thermal Effect on the Structural, Electrical, and Optical Properties of In-Line Sputtered Aluminum Doped Zinc Oxide Films Explored with Thermal Desorption Spectroscopy,” Journal of Nanomaterials, vol. 2014, Article ID 690498, 6 pages, 2014. https://doi.org/10.1155/2014/690498.