Thermal Effect on the Structural, Electrical, and Optical Properties of In-Line Sputtered Aluminum Doped Zinc Oxide Films Explored with Thermal Desorption Spectroscopy

Table 2

The electrical properties: carrier concentration, mobility, electrical resistivity, and percent variation of electrical resistivity of the AZO films deposited at room temperature (RT), 100°C, and 200°C before and after measuring TDS.

Substrate temperature	Before			After			Electrical resistivity’s percent variation (%)
	Carrier concentration; (10^20 cm^−3)	Mobility; (cm^2/V-s)	Electrical resistivity; (10^−4 Ω-cm)	Carrier concentration; (10^20 cm^−3)	Mobility; (cm^2/V-s)	Electrical resistivity; (10^−4 Ω-cm)
RT	3.7	6.4	27	4.1	8.0	19	−30
100°C	0.6	6.6	160	1.3	6.9	69	−57
200°C	6.0	6.4	16	6.9	7.5	12	−25