ZnO Thin-Film Transistor Grown by rf Sputtering Using Carbon Dioxide and Substrate Bias Modulation

Figure 5

(a) Drain currents of samples A1 (dashed line) and B1 (solid line), measured at  V. (b) Drain currents of sample B1 as a function of drain voltage. Sample A1 was grown with CO₂ and sample B1 with O₂.

(a)

(b)