Research Article
Electromagnetic Wave Shielding Effectiveness Based on Carbon Microcoil-Polyurethane Composites
| C2H2 flow rate (sccm) | H2 flow rate (sccm) | SF6 flow rate (sccm) | Total pressure (Torr) | Total deposition time (min) |
Source gases flow time (min) | Substrate temp. (°C) | C2H2 | H2 | SF6 |
| 15 | 35 | 35 | 100 | 90 | 90 | 90 | 5 | 750 |
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