Effects of Hydrogen on the Optical and Electrical Characteristics of the Sputter-Deposited Al₂O₃-Doped ZnO Thin Films

Figure 1

SEM observations of AZO thin films as a function of H₂/(H₂ + Ar) flowing rate, for the as-deposited samples (a) 0%, (b) 2%, (c) 4%, and (d) 9.09%, and for the as-deposited and plasma-treated samples (e) 0%, (f) 2%, (g) 4%, and (h) 9.09%.

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