Indium-Nitrogen Codoped Zinc Oxide Thin Film Deposited by Ultrasonic Spray Pyrolysis on n-(111) Si Substrate: The Effect of Film Thickness

Table 1

Texture coefficient TC₍₀₀₂₎ and TC₍₁₀₁₎ for samples S1 to S3.

Sample	Thickness (nm)	TC(002)	TC(101)
S1	154	2.44	0.30
S2	385	2.07	0.52
S3	1089	0.66	1.74