Substrate Temperature Effect on the Microstructure and Properties of (Si, Al)/a-C:H Films Prepared through Magnetron Sputtering Deposition

Figure 4

(a–e) Raman spectra of the films deposited at different temperatures; (f) G band position and (D)/(G) as a function of substrate temperatures.

(a)

(b)

(c)

(d)

(e)

(f)