Oxidation and Corrosion Behavior of Nanolaminated MAX-Phase Ti₂AlC Film Synthesized by High-Power Impulse Magnetron Sputtering and Annealing

Table 2

The chemistry compositions of the MAX-phase Ti₂AlC target and the films at various temperature.

Composition (atomic %)	Ti	Al	C	O
Target	47.29	22.01	25.27	5.43
As-deposited film	42.73	27.48	24.22	5.57
Film annealed at 800°C	48.02	22.87	23.09	6.02