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Journal of Nanomaterials
Volume 2015, Article ID 276790, 7 pages
Research Article

Study of Synchrotron Radiation Near-Edge X-Ray Absorption Fine-Structure of Amorphous Hydrogenated Carbon Films at Various Thicknesses

1Graduate School of Engineering, Nagaoka University of Technology, 16031-1 Kamitomioka, Nagaoka, Niigata 940-2188, Japan
2Synchrotron Light Research Institute (Public Organization), 111 University Avenue, Muang District, Nakhon Ratchasima 30000, Thailand
3Extreme Energy-Density Research Institute, Nagaoka University of Technology, 16031-1 Kamitomioka, Nagaoka, Niigata 940-2188, Japan
4Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori-cho, Ako-gun, Hyogo 678-1205, Japan

Received 9 September 2015; Revised 8 December 2015; Accepted 9 December 2015

Academic Editor: Hongbin Bei

Copyright © 2015 Sarayut Tunmee et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


The compositions and bonding states of the amorphous hydrogenated carbon films at various thicknesses were evaluated via near-edge X-ray absorption fine-structure (NEXAFS) and elastic recoil detection analysis combined with Rutherford backscattering spectrometry. The absolute carbon sp2 contents were determined to decrease to 65% from 73%, while the hydrogen contents increase from 26 to 33 at.% as the film thickness increases. In addition, as the film thickness increases, the (C=C), (C–H), (C=C), and (C≡C) bonding states were found to increase, whereas the (C≡C) and (C–C) bonding states were observed to decrease in the NEXAFS spectra. Consequently, the film thickness is a key factor to evaluate the composition and bonding state of the films.