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Journal of Nanomaterials
Volume 2015, Article ID 327596, 5 pages
http://dx.doi.org/10.1155/2015/327596
Research Article

Grown Low-Temperature Microcrystalline Silicon Thin Film by VHF PECVD for Thin Films Solar Cell

Shanglong Peng,1,2 Desheng Wang,1 Fuhua Yang,2 Zhanguo Wang,2 and Fei Ma1

1School of Physical Science & Technology, Lanzhou University, Lanzhou 730000, China
2Key Laboratory of Semiconductor Material Sciences, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

Received 6 December 2014; Accepted 13 February 2015

Academic Editor: William W. Yu

Copyright © 2015 Shanglong Peng et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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