Grown Low-Temperature Microcrystalline Silicon Thin Film by VHF PECVD for Thin Films Solar Cell

Table 1

The results of Raman and XRD analysis for the c-Si:H thin films deposited at various silane concentrations. is the grain size; is the crystalline volume fraction.

(%)	13	9	6	5	4
(nm)	0	11.4	21.6	32.3	45.6
(%)	12.4	35.5	59.4	61.5	74.1