Crystallization Behavior and Thermal Analysis of CoFeB Thin Films

Table 1

(a) Thermal parameters of amorphous Co₄₀Fe₄₀B₂₀ thin films and (b) thermal parameters of amorphous Co₆₀Fe₂₀B₂₀ thin films.

(a)

thickness (Å)	(K)	(K)	(K)				(kJ/mol)
25	532	635	103	0.371	0.323	0.515	64.18
50	513	682	169	0.358	0.351	0.594	55.01
75	499	612	113	0.348	0.317	0.507	45.78
100	507	622	115	0.354	0.321	0.515	48.31
200	504	647	143	0.352	0.334	0.551	54.44

(b)

thickness (Å)	(K)	(K)	(K)				(kJ/mol)
25	546	679	133	0.381	0.343	0.567	55.18
50	549	673	124	0.383	0.340	0.557	75.82
75	546	692	146	0.381	0.350	0.586	83.44
100	553	657	104	0.386	0.331	0.532	80.20
200	551	691	140	0.385	0.349	0.581	74.46