Research Article

Preparation and Characterization of Highly Flexible Al2O3/Al/Al2O3 Hybrid Composite

Figure 1

(a) Digital photograph, (b) cross section SEM image, (c) TEM image, and (d) XRD pattern of the sample. The cross section SEM image was taken at the state that the sample was covered with a Pt layer on the top and tilted 52° towards the ion beam. The red arrows in (c) point out the boundary of Al/Al2O3 film.
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