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Journal of Nanomaterials
Volume 2015 (2015), Article ID 413687, 8 pages
Research Article

Theoretical Simulation and Optimization on Material Parameters of Thin Film Bulk Acoustic Resonator

1College of Science, Xi’an University of Science and Technology, Xi’an 710054, China
2Laboratory of Modern Acoustics, Institute of Acoustics, Nanjing University, Nanjing 210093, China

Received 20 June 2015; Accepted 6 September 2015

Academic Editor: Jun Chen

Copyright © 2015 Tao Zhang et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


The resonance frequency, , and the effective electromechanical coupling factor, , of thin film bulk acoustic resonators (FBARs) are derived by transfer matrix method. The effects of thickness and density of electrode on and with different piezoelectric layers are investigated by numerical calculation method. The results show that thickness and density of electrode affect obviously, especially in large thickness and density area. Moreover, the effects of thickness, density, and acoustic velocity of electrode on of FBAR were also studied. The results show that there is a maximum corresponding to the composition of thickness and density of electrode which is about 20% over the original electromechanical factor of piezoelectric film. is in the direct proportion to the density and of electrode, respectively. The electrode thickness affects small with high ; moreover, when is high enough, then has almost nothing to do with . always rises with electrode thickness first and then descends with its rising, and the thickness corresponding to the maximum is different with different electrode, but it always locates in the special area. All above results indicate that the thickness, density, and acoustic velocity of electrode are so important that these results can be applied to design FBAR.