Research Article
Theoretical Simulation and Optimization on Material Parameters of Thin Film Bulk Acoustic Resonator
Figure 10
of FBAR versus the thickness and the acoustic velocity of electrode with AlN piezoelectric film and different density (2D curves).
| (a) kg/m3 |
| (b) kg/m3 |
| (c) kg/m3 |
| (d) kg/m3 |