Research Article
Theoretical Simulation and Optimization on Material Parameters of Thin Film Bulk Acoustic Resonator
Figure 8
of FBAR versus the thickness and the acoustic velocity of electrode with ZnO piezoelectric film (2D curves).
| (a) kg/m3 |
| (b) kg/m3 |
| (c) kg/m3 |
| (d) kg/m3 |