Theoretical Simulation and Optimization on Material Parameters of Thin Film Bulk Acoustic Resonator

<div><svg height="15.5395pt" id="M158" style="vertical-align:-3.9481pt" version="1.1" viewbox="-0.0498162 -11.5914 17.1252 15.5395" width="17.1252pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M480 416C480 431 465 448 438 448C388 448 312 383 252 330C217 299 188 273 155 237H153L257 680C262 700 263 712 253 712C240 712 183 684 97 674L92 648L126 647C166 646 172 645 163 606L23 -6L29 -12C51 -5 77 2 107 8C115 62 130 128 142 180C153 193 179 220 204 241C231 170 259 106 288 54C317 0 336 -12 358 -12C381 -12 423 2 477 80L460 100C434 74 408 54 398 54C385 54 374 65 351 107C326 154 282 241 263 299C296 332 351 377 403 377C424 377 436 372 445 368C449 366 456 368 462 375C472 386 480 402 480 416Z" id="g113-108"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="503" vert-adv-y="503"></glyph.data></g><g transform="matrix(.0091,0,0,-0.0091,6.539,-5.741)"><path d="M414 144C384 79 371 75 317 75H135L276 221C367 316 408 376 408 465C408 570 327 635 237 635C179 635 131 609 100 575L42 494L67 471C94 510 138 565 205 565C277 565 321 517 321 435C321 348 258 270 195 195C146 137 88 81 33 26V0H411C423 44 433 88 446 135L414 144Z" id="g50-51"></path><glyph.data ascent="3443" descent="-2856" horiz-adv-x="487" vert-adv-y="487"></glyph.data></g><g transform="matrix(.0091,0,0,-0.0091,6.474,3.784)"><path d="M384 109C349 76 310 59 268 59C197 59 123 113 120 245C240 248 367 259 384 262C403 266 407 275 407 296C407 376 338 451 254 451H253C201 451 148 425 105 378C65 334 39 272 39 203C39 88 112 -12 235 -12C266 -12 339 5 402 84L384 109ZM230 411C285 411 319 365 319 313C319 298 313 293 294 293C236 291 180 290 125 290C141 370 185 411 230 411Z" id="g58-99"></path><glyph.data ascent="1007" descent="-369" horiz-adv-x="434" vert-adv-y="434"></glyph.data></g><g transform="matrix(.0091,0,0,-0.0091,10.423,3.784)"><path d="M100 439H52L25 408L28 396H100V106C100 41 92 35 31 30V0H250V29C188 37 181 41 181 106V396H372V107C372 40 365 37 309 29V0H537V29C461 37 453 40 453 106V396H564C576 403 579 428 574 439H453V469C452 558 462 604 474 623S500 656 527 656C562 656 589 634 608 615C619 604 628 607 639 615C647 622 658 633 661 641C666 653 664 664 656 674C637 696 609 708 572 710C528 703 483 682 439 638C418 661 380 685 320 688C269 683 230 666 190 633C139 593 122 550 113 525S100 476 100 451V439ZM372 439H181V461C181 530 194 571 211 598C226 621 248 643 287 643C343 643 379 607 400 578C391 561 384 546 381 529C376 510 372 486 372 457V439Z" id="g58-26"></path><glyph.data ascent="1007" descent="-369" horiz-adv-x="572" vert-adv-y="572"></glyph.data></g></svg> of FBAR versus the thickness and the acoustic velocity of electrode with AlN piezoelectric film and different density (3D curves).</div>

Journal of Nanomaterials

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Figure 9

Figure 9: Theoretical Simulation and Optimization on Material Parameters of Thin Film Bulk Acoustic Resonator 