Theoretical Simulation and Optimization on Material Parameters of Thin Film Bulk Acoustic Resonator

Table 1

Data of material properties.

Material	Density; (kg/m^3)	Velocity; (m/s)	Impedance; (10^6 kg/m^3s)
ZnO	5606	6350	35.6	7.50
AlN	3300	11050	36.5	6.25