Spectral Monitoring CH/C<sub>2</sub> Ratio of Methane Plasma for Growing Single-Layer Graphene on Cu

<div>(a) Plasma-assisted CVD system apparatus that is composed of two parallel negative and positive electrodes, and the optical fiber was used to obtain the plasma emission spectra. (b) Transport kinetics of gaseous species that are formed by decomposition from methane and used in graphene growth include four steps.</div>

Journal of Nanomaterials

fig1

Figure 1

Figure 1: Spectral Monitoring CH/C<sub>2</sub> Ratio of Methane Plasma for Growing Single-Layer Graphene on Cu 

Journal of Nanomaterials

Spectral Monitoring CH/C2 Ratio of Methane Plasma for Growing Single-Layer Graphene on Cu

Figure 1

Spectral Monitoring CH/C₂ Ratio of Methane Plasma for Growing Single-Layer Graphene on Cu