Research Article

N-Type Conductive Ultrananocrystalline Diamond Films Grown by Hot Filament CVD

Table 2

Parameters, found by fitting Lorentzian curves in the measured Raman spectra.

NH3 (%)FWHM (G) (cmāˆ’1)(D)/(G) (S/cm)

0.3556.21.370.2974
1.75104.51.080.0113
3.5125.30.720.0004