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Journal of Nanomaterials
Volume 2015, Article ID 543631, 5 pages
http://dx.doi.org/10.1155/2015/543631
Research Article

A Low-Stress, Elastic, and Improved Hardness Hydrogenated Amorphous Carbon Film

1School of Physics, Lanzhou University, Lanzhou 730000, China
2State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China

Received 6 October 2014; Accepted 2 December 2014

Academic Editor: Yuanlie Yu

Copyright © 2015 Qi Wang et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Qi Wang, Deyan He, and Junyan Zhang, “A Low-Stress, Elastic, and Improved Hardness Hydrogenated Amorphous Carbon Film,” Journal of Nanomaterials, vol. 2015, Article ID 543631, 5 pages, 2015. https://doi.org/10.1155/2015/543631.