Research Article
A Low-Stress, Elastic, and Improved Hardness Hydrogenated Amorphous Carbon Film
Figure 1
(a) Thickness and compressive stress of the as-deposited hydrogenated amorphous carbon films versus H2 flow rate; (b) hardness and elastic recovery of the as-deposited hydrogenated amorphous carbon films versus H2 flow rate.
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| (b) |