Influence of Deposition Rate on the Thermoelectric Properties of Sb₂Te₃ Thin Films by Thermal Evaporation Method

Figure 3

XRD patterns of Sb₂Te₃ thin films deposited on SiO₂/Si substrates at various evaporation currents: (a) JCPDS, (b) 50 A, (c) 60 A, (d) 70 A, and (e) 80 A.