Research Article
Ge Nanoislands Grown by Radio Frequency Magnetron Sputtering: Comprehensive Investigation of Surface Morphology and Optical Properties
Table 2
The size, volume, ratio of grain area, rms roughness, number density, and morphology of samples obtained from AFM results.
| | Sample name | Width
(nm) | Height
(nm) | Volume
(nm3) | Ratio of grain area | rms roughness
(nm) | Number density
×102/µm2 | Morphology |
| | SR.T | 15 | 6 | 450 | 25 | 0.85 | 0.9 | Pyramidal | | S200 | 8 | 5 | 106 | 36 | 0.32 | 1.1 | Pyramidal | | S300 | 8 | 5 | 106 | 40 | 0.20 | 2.2 | Pyramidal | | S400 | 8 | 4 | 85 | 47 | 0.18 | 2.4 | Pyramidal | | D300 | 8 | 4 | 85 | 47 | 0.18 | 2.4 | Pyramidal | | D420 | 17 | 7 | 674 | 29 | 0.41 | 1.6 | Pyramidal | | D540 | 20 | 2 | 266 | 25 | 0.11 | 1.4 | Pyramid-like | | D660 | 30 | 4 | 1200 | 23 | 0.15 | 1.1 | Step-like facets pyramid | | F5 | 12 | 5 | 240 | 17 | 0.31 | 1.2 | Pyramidal | | F10 | 8 | 4 | 85 | 47 | 0.18 | 2.4 | Pyramidal | | F12.5 | 18 | 7 | 756 | 20 | 0.71 | 1.6 | Multifaceted | | R50 | 18 | 8 | 864 | 25 | 0.84 | 1.8 | Pyramidal | | R150 | — | — | — | — | 2.2 | — | Thin film | | R250 | — | — | — | — | 3.1 | — | Thin film | | H | 8 | 4 | 85 | 47 | 0.18 | 2.4 | Pyramidal | | H300 | 9 | 3 | 81 | 17 | 0.35 | 0.7 | Multifaceted | | H450 | 12 | 2 | 96 | 25 | 0.21 | 1.5 | Multifaceted dome | | H650 | 16 | 2 | 130 | 34 | 0.15 | 1.8 | Dome-like | | A | 8 | 4 | 85 | 47 | 0.18 | 2.4 | Pyramidal | | A30 | 10 | 3 | 81 | 30 | 0.21 | 2.0 | Multifaceted | | A90 | 14 | 3 | 144 | 30 | 0.17 | 1.9 | Dome-like | | A120 | 16 | 2 | 130 | 27 | 0.15 | 1.8 | Dome-like |
|
|
