Enhancement of Two-Dimensional Electron-Gas Properties by Zn Polar ZnMgO/MgO/ZnO Structure Grown by Radical-Source Laser Molecular Beam Epitaxy

Table 1

Typical Hall mobility () and 2DEG density () measured at 300 K and 10 K for ZnMgO/ZnO structures with or without MgO interfacial layers.

Structure	ZnMgO; thickness (nm)	(×10^12 cm^−2)		(cm^2/Vs)
		300 K	10 K	300 K	10 K
ZnMgO/MgO/ZnO	20	25	22	332	3090
ZnMgO/ZnO	20	1.5	0.2	137	130
ZnMgO/MgO/ZnO	100	2.2	1.9	321	2480
ZnMgO/ZnO	100	0.2	0.4	215	2360