Transition Metal Ion Implantation into Diamond-Like Carbon Coatings: Development of a Base Material for Gas Sensing Applications

<div>Carbon depth profiles of DLC coatings implanted with 30 kV Ar, Cu, and Ag calculated with T-DYN. The inset shows the corresponding simulated hydrogen depth profiles. The dashed line indicates the nominal C concentration of the DLC coatings.</div>

Journal of Nanomaterials

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Figure 2

Figure 2: Transition Metal Ion Implantation into Diamond-Like Carbon Coatings: Development of a Base Material for Gas Sensing Applications 