Transition Metal Ion Implantation into Diamond-Like Carbon Coatings: Development of a Base Material for Gas Sensing Applications

<div>Silver depth profiles measured with RBS in the region of the Ag peak using a 2 MeV <sup>4</sup>He<sup>+</sup> ion beam. The inset shows the RBS spectrum of a DLC coating on silicon implanted with Ag <svg height="9.04777pt" id="M21" style="vertical-align:-0.04981995pt" version="1.1" viewbox="-0.0498162 -8.99795 10.3533 9.04777" width="10.3533pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.0135,0,0,-0.0135,0,0)"><path d="M488 658H270V630C328 626 335 619 335 579C217 574 44 509 44 330C44 147 221 88 335 86C335 38 328 32 265 28V0H488V28C425 32 418 38 418 86C534 88 710 153 710 337C710 517 538 575 418 579C418 619 425 626 488 630V658ZM335 118C249 124 136 180 136 337C136 490 251 543 335 547V118ZM418 547C502 543 618 491 618 333S503 124 418 118V547Z" id="g113-150"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="754" vert-adv-y="754"></glyph.data></g></svg> = 1.24 × 10<sup>16</sup> at. cm<sup>−2</sup>. The dashed line shows the Si substrate.</div>

Journal of Nanomaterials

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Figure 4

Figure 4: Transition Metal Ion Implantation into Diamond-Like Carbon Coatings: Development of a Base Material for Gas Sensing Applications 