Transition Metal Ion Implantation into Diamond-Like Carbon Coatings: Development of a Base Material for Gas Sensing Applications

Table 2

Change in resistance of DLC coatings implanted with Ar, Cu, and Ag ions in dependence of ion species and fluence.

Dopant ion	Fluence (at. cm^−2)
Ar	2.24 × 10^14	2.6 ± 0.5
Ar	2.24 × 10^15	8.7 ± 1.7
Ar	2.24 × 10^16	679 ± 140
Cu	1.92 × 10^14	29 ± 6
Cu	1.92 × 10^15	149 ± 30
Cu	1.92 × 10^16	66200 ± 1300
Ag	1.24 × 10^14	0.9 ± 0.2
Ag	1.24 × 10^15	17 ± 3
Ag	1.24 × 10^16	3.1E5 ± 6000