Table 2: The characteristics of Raman spectra of DLC films deposited at different positions.

SampleC0C25A90

Gaussian fit-peak (cm−1)1558.471552.991557.72
/0.680.500.26

BWF fit−3.02−6.27−8.96
/0.160.027~0

sp3 fraction Increasing

(Å)11.109.536.86

Clusters areaDecreasing