Mobility Limitations due to Dislocations and Interface Roughness in AlGaN/AlN/GaN Heterostructure

<div>(a) Dark-field cross-sectional TEM image, (b) bright-field plan-view TEM image, and (c) high-resolution cross-sectional TEM image of the AlGaN/AlN/GaN heterostructure.</div>

Journal of Nanomaterials

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Figure 2

Figure 2: Mobility Limitations due to Dislocations and Interface Roughness in AlGaN/AlN/GaN Heterostructure 