Mobility Limitations due to Dislocations and Interface Roughness in AlGaN/AlN/GaN Heterostructure

Table 1

Parameters of ZnO employed in calculations. Here is the free electron mass.

Parameter	Symbol (units)	Value
Mass density	(kg/m^−3)
Electron effective mass
Dielectric constant (high frequency)
Dielectric constant (low frequency)
LA-phonon velocity	(m/s)
LO-phonon energy	(meV)
Piezoelectric tensor	(C/m^2)
	(C/m^2)
	(C/m^2)
Deformation constant	(eV)

[16], ^b[20], ^c[22].