Research Article
Mobility Limitations due to Dislocations and Interface Roughness in AlGaN/AlN/GaN Heterostructure
Table 1
Parameters of ZnO employed in calculations. Here
is the free electron mass.
| Parameter | Symbol (units) | Value |
| Mass density | (kg/mā3) | | Electron effective mass | | | Dielectric constant (high frequency) | | | Dielectric constant (low frequency) | | | LA-phonon velocity | (m/s) | | LO-phonon energy | (meV) | | Piezoelectric tensor | (C/m2) | | (C/m2) | | (C/m2) | | Deformation constant | (eV) | |
|
|
[16], b[20], c[22].
|