Research Article

Strain Driven Phase Decomposition in Ion-Beam Sputtered Pr1−XCaXMnO3 Films

Table 1

Ca content , Mn excess , substrate type, used sputter gas and thickness of the different samples, and the deposition temperature . Samples with the same capital letter but different numbers were prepared in the same deposition run. Small letters indicate that samples were prepared at the same lateral position but at different vertical positions . Therefore, composition and thickness of these samples are equal.

SampleSubstrateSputter gas [nm] [°C]

A0_100STOXe410675
B03_10.30Pt/MgOXe300800
C03_10.350STNOXe110800
D03_1a0.330STOAr175750
D03_1b0.330MgOAr175750
E03_10.350MgOXe300800
F03_1a0.360STOXe130750
F03_1b0.360MgOXe130750
G03_10.35−0.02STOXe165750
H05_10.50Pt/MgOXe380800