Research Article
Physical Properties of ZnO Thin Films Codoped with Titanium and Hydrogen Prepared by RF Magnetron Sputtering with Different Substrate Temperatures
Figure 6
FE-SEM images of TZO thin films deposited at RT and 300°C with = 0, 5%, and 10%.
(a) RT, |
(b) 300°C, |
(c) RT, |
(d) 300°C, |
(e) RT, |
(f) 300°C, |