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Journal of Nanomaterials
Volume 2015, Article ID 947947, 7 pages
Research Article

Nanomechanical and Macrotribological Properties of CVD-Grown Graphene as a Middle Layer between Metal Pt Cylinders and SiO2/Si Substrate

1National Laboratory of Solid State Microstructures and Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, China
2Department of Material Physics, Nanjing University of Information Science and Technology, Nanjing 210044, China
3Department of Civil and Environmental Engineering, University of Missouri-Columbia, Columbia, MO 65211, USA
4Department of Mechanical Engineering, GIK Institute of Engineering Sciences & Technology, Topi, Khyber Pakhtunkhwa 23460, Pakistan

Received 2 September 2015; Accepted 7 October 2015

Academic Editor: Ungyu Paik

Copyright © 2015 Hongyan Wu et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


The CVD-grown graphene as a middle layer was introduced between Pt cylinders and SiO2/Si to extend the application of graphene for improving the wear performance of microelectromechanical systems. Periodic arrays of Pt cylinders were prepared on the graphene/SiO2/Si (Pt/graphene) and SiO2/Si substrate (Pt/SiO2) using the magnetron sputtering technique. To characterize Pt/graphene and Pt/SiO2, nanoindentation and macrotribological tests were performed. The results showed that the friction coefficient was lower and the wear lifetime of Pt/graphene was longer than those of Pt/SiO2. Graphene, as a middle layer, was not only observed to have significant influence on the mechanical properties (i.e., microhardness and elastic modulus), but also found to improve the adhesive strength between SiO2/Si and Pt cylinders.