The Role of Edge Dislocations on the Red Luminescence of ZnO Films Deposited by RF-Sputtering

Table 1

Thickness and roughness of ZnO layers for samples Z1 and Z2.

Sample	Thickness (nm)	Roughness (nm)
Z1	322 ± 12	38 ± 12
Z2	195 ± 20	84 ± 20