The Role of Edge Dislocations on the Red Luminescence of ZnO Films Deposited by RF-Sputtering

Table 3

TD densities at ZnO surface and annihilation for samples Z1 and Z2.

Sample	Surface dislocation densities		Annihilation of screw + mixed TDs (%)
	Edge + mixed	Screw + mixed
	(10^8 cm^−2)	(10^8 cm^−2)
Z1	84.9 ± 10.3	12.1 ± 0.7	44
Z2	31.7 ± 3.9	4.5 ± 0.3	51