Metal/Metal-Oxide Nanoclusters for Gas Sensor Applications

Figure 6

(a) The effect of the sputtering discharge power on the nanocluster size distribution. (b) The dependence of the peak diameter on the sputtering discharge power. (c) The dependence of the peak diameter on Ar flow rate for aggregations lengths in the range of 30–90 mm. The dashed lines are the theoretical nanocluster size calculation for and 70 mm. The solid lines serve as guide to the eye to show zone I increase in the peak diameter with for  mm and  sccm and zone II decrease in the peak diameter with for  mm or for  mm and  sccm. (d) The dependence of the peak diameter on for , 30, and 50 sccm. The dashed lines are the theoretical nanocluster size calculations for and 30 sccm. Reprinted with AIP permission from [13].

(a)

(b)

(c)

(d)