Structure and Properties of Nanocrystalline (TiZr)<sub><i>x</i></sub>N<sub>1−<i>x</i></sub> Thin Films Deposited by DC Unbalanced Magnetron Sputtering

<div>TiZrN film hardness as a function of nitrogen flow rate.</div>

Journal of Nanomaterials

fig15

Figure 15

Figure 15: Structure and Properties of Nanocrystalline (TiZr)<sub><i>x</i></sub>N<sub>1−<i>x</i></sub> Thin Films Deposited by DC Unbalanced Magnetron Sputtering 

Journal of Nanomaterials

Structure and Properties of Nanocrystalline (TiZr)xN1−x Thin Films Deposited by DC Unbalanced Magnetron Sputtering

Figure 15

Structure and Properties of Nanocrystalline (TiZr)_xN_1−x Thin Films Deposited by DC Unbalanced Magnetron Sputtering