Research Article
Structure and Properties of Nanocrystalline (TiZr)xN1−x Thin Films Deposited by DC Unbalanced Magnetron Sputtering
Figure 8
Deconvolution spectra of samples deposited at a nitrogen flow rate of 1.9 sccm: (a) Zr-3d and (b) Ti-2p peaks.
| (a) |
| (b) |